XY Stages
Thermionics XY stages provide precise 2-axis positioning. They can be combined with Z, ZB and ZC series linear translators for complete dual bellows XYZ manipulation.
Features
- Precision cross-roller bearings
- X micrometer location interchangeable
- Aluminum stage construction
- Stainless steel only material exposed to vacuum
- All position operation
- Maximum bakeout temperature: 200°C
OPERATION NOTE: Some models require a horizontal-mounting package, sold separately.
Specifications
Bellows I.D.
- 1.39″–6.3″ I.D. bellows available
X & Y Axes
- ±0.5″ or ±1.0″ X & Y travel, circular pattern
- Preloaded micrometer to stage coupling, 0.001″ micrometer divisions, small micrometers (on 1.39″ bellows I.D. models)
- Preloaded micrometer to stage coupling, 0.0001″ micrometer divisions, large drum dial micrometers (on 2.00″ through 4.00″ bellows I.D. models)
Base Flange
- Standard base flange is clearance, tapped is optional except on large bore XY models where tapped is required.
Traveling Flange
- Standard traveling flange is tapped, clearance is optional except for large bore XY models.
Ordering Information
Bellows I.D. |
Base Flange |
Traveling Flange |
XY Travel |
Model No. |
| 1.39 | 2.75 | 2.75 | ±0.5 | XY-B275C-T275T-1.39-1 |
| 2.5 | 4.5 | 4.5 | ±0.5 | XY-B450C-T450T-2.5-1 |
| 2.5 | 4.5 | 4.5 | ±1.0 | XY-B450C-T450T-2.5-2 |
| 2.5 | 6.0 | 6.0 | ±0.5 | XY-B600C-T600T-2.5-1 |
| 2.5 | 6.0 | 6.0 | ±1.0 | XY-B600C-T600T-2.5-2 |
| 3.0 | 6.0 | 6.0 | ±0.5 | XY-B600T-T600T-3.0-1 |
| 3.0 | 6.0 | 6.0 | ±1.0 | XY-B600T-T600T-3.0-2 |
| 4.0 | 6.0 | 6.0 | ±0.5 | XY-B600T-T600T-4.0-1 |
| 4.0 | 6.0 | 6.0 | ±1.0 | XY-B600T-T600T-4.0-2 |
| 6.3 | 8.0 | 8.0 | ±1.0 | XY-B800T-T800T-6.3-2 |
Dimensions in inches
| Configuration | EBXY-B800C-T600T, EBXY-B800C-T600TM, EBXY-B800T-T600T, EBXY-B800TM-T600TM, EBXY-B800C-T800T, EBXY-B800C-T800TM, EBXY-B800T-T800T, EBXY-B800TM-T800TM, EBXY-B1000C-T800T, EBXY-B1000C-T800TM, EBXY-B1000T-T800T, EBXY-B1000TM-T800TM |
|---|---|
| Bellows | 6.3 |
| Stroke | 1(±1/2), 2(±1) |
| Drive | Large Micrometer, MS-LS |
| Options | HMP, EDL, ZPI, None |
Options
XY Micrometers, ±0.5″ Travel
- Large micrometers with 0.0001″ divisions
- Set of two
XY Micrometers, ±1.0″ Travel
- Large micrometers with 0.0001″ divisions
Horizontal Mounting Package
- Larger base flange, as required
- Oversized guide rods, as required
- Modified travel limit
- Two force spring assemblies, custom force level based on customer payload