EB Series XYZ Manipulators
EB Series XYZ manipulators deliver precision motion, mechanical strength, and the versatility required for demanding UHV applications. With bellows inside diameters up to 6.3″, the EB Series accommodates larger components while maintaining rigidity and stability under load.
The EB Series is available in multiple configurations, with X/Y strokes of ±0.5″ or ±1″ and Z-axis travel ranging from 2″ to 36″. Users can choose manual or MS-LS drive options, along with a variety of enhancements such as EDL, ZPI, HMP, or POGO.
Differentially pumped rotary seals provide an additional degree of rotary freedom at full bellows I.D., ensuring flexibility for integration with customer equipment.
Specifications
X & Y Axes
- ±0.5″ or ±1″ X and Y travel, circular pattern
- Preloaded micrometer-to-stage coupling, 0.0001″ micrometer divisions
- Large drum dial micrometers standard (metric micrometers optional)
Z Axis
- 2″ to 36″ Z travel
- 4:1 worm Acme gearbox drive, 0.050″/turn (20 turns/inch)
- 0.001″ divisions
- Preloaded lead screw and worm shaft
- Position lock
Base Flange
- 4.5″, 6″, 8″, or 10″ O.D.
Traveling Flange
- 4.5″, 6″, or 8″ O.D. traveling flange
Features
- Rigid 5-sided box construction
- Hardened stainless steel bearings and guide rods throughout
- Adjustable bearings for long service life
- Wide guide rod spacing (7″ to 9″) for added stability
- Wide bearing spacing (6″) on rods
- Maximum bakeout temperature: 200 °C with micrometers attached
| Configuration | EB-B800C-T800C-6.30, EB-B800C-T800T-6.30, EB-B800C-T800TM-6.30, EB-B800T-T800C-6.30, EB-B800T-T800T-6.30, EB-B800TM-T800C-6.30, EB-B800TM-T800TM-6.30 |
|---|---|
| Stroke XY | 1(±1/2), 2(±1) |
| Stroke Z | 2, 4, 6, 8, 10, 12, 14, 16, 18, 20, 22, 24, 26, 28, 30, 32, 34, 36 |
| Drive | Manual, MS-LS |
| Options | EDL, ZPI, HMP, POGO, None |